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MEMS Sensor for in-situ TEM Atomic Force microscopy
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2007 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE conference proceedings, 2007, p. 103-106Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
IEEE conference proceedings, 2007. p. 103-106
Keywords [en]
nanotechnology nanoteknik
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Natural Sciences
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URN: urn:nbn:se:miun:diva-3897DOI: 10.1109/MEMSYS.2007.4433025Scopus ID: 2-s2.0-52249110181Local ID: 4248ISBN: 9781424409518 (print)OAI: oai:DiVA.org:miun-3897DiVA, id: diva2:28929
Available from: 2008-11-30 Created: 2008-11-30 Last updated: 2025-09-25Bibliographically approved

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Olin, Håkan

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