Silicon carbide MESFET devices are well suited for high speed, high power and high temperature electronics due to high saturation velocity, high critical electrical field, good thermal conductivity and large band-gap. Optimization of a high performance device demands a substantial number of numerical simulations, where several different design parameters have to be investigated thoroughly. In this work, we optimize the geometry of lateral MESFETs for maximal unity current-gain frequency (fT) using iterative 2-dimensional simulations. We also present a comparison of performance for individually optimized devices, realized with lithographic resolutions ranging from 0.2 to 2 μm in different SiC polytypes.
19th Nordic Semiconductor Meeting (NSM19), may 20-23, 2001, Copenhagen, Denmark