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Fabrication of an integrated Delta E-E-silicon detector by wafer bonding using cobalt disilicide
Thungström, Göran
Mid Sweden University, Faculty of Science, Technology and Media, Department of Information Technology and Media.
van Veldhuizen, Elbert Jan
Westerberg, Lars
Norlin, Lars-Olov
Peterson, Sture
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1997 (English)
In:
Nuclear Instruments & Methods in Physics Research. Section A. Accelerators, Spectrometers, Detectors, and Associated Equipment, Vol. 391, no 2, p. 315-328
Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1997. Vol. 391, no 2, p. 315-328
Keywords [en]
integrated DE-E detctor Wafer bonding
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN:
urn:nbn:se:miun:diva-1560
DOI:
10.1016/S0168-9002(97)00408-7
ISI:
A1997XL50700008
Local ID: 770
OAI: oai:DiVA.org:miun-1560
DiVA, id:
diva2:26592
Available from:
2008-09-30
Created:
2008-09-30
Last updated:
2025-09-25
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Thungström, Göran
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