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Wet etching of single crystal quartz
Bäcklund, Ylva
Uppsala universitet, Institutionen för materialvetenskap.
Vangbo, Mattias
Uppsala universitet, Institutionen för materialvetenskap.
Rangsten, Pelle
Uppsala universitet, Institutionen för materialvetenskap.
Hedlund, Christer
Uppsala universitet, Institutionen för materialvetenskap.
ORCID iD:
0000-0003-2352-9006
1998 (English)
In:
Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998
Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1998.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN:
urn:nbn:se:miun:diva-31580
OAI: oai:DiVA.org:miun-31580
DiVA, id:
diva2:1140974
Conference
Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands
Available from:
2007-03-01
Created:
2017-09-13
Last updated:
2025-09-25
Bibliographically approved
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Hedlund, Christer
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ieee
modern-language-association-8th-edition
vancouver
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apa
ieee
modern-language-association-8th-edition
vancouver
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en-GB
en-US
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nn-NB
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