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A method for the determination of the angular dependence during dry etching
Hedlund, Christer
Uppsala universitet, Institutionen för materialvetenskap.
ORCID iD:
0000-0003-2352-9006
Strandman, Carola
Uppsala universitet, Institutionen för materialvetenskap.
Katardjiev, Ilia
Uppsala universitet, Institutionen för materialvetenskap.
Bäcklund, Ylva
Uppsala universitet, Institutionen för materialvetenskap.
Berg, Sören
Uppsala universitet, Institutionen för materialvetenskap.
Blom, Hans-Olof
Uppsala universitet, Institutionen för materialvetenskap.
Show others and affiliations
1995 (English)
In:
The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995
Conference paper (Refereed)
Place, publisher, year, edition, pages
1995.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN:
urn:nbn:se:miun:diva-31584
OAI: oai:DiVA.org:miun-31584
DiVA, id:
diva2:1140973
Conference
The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct
Available from:
2007-03-07
Created:
2017-09-13
Last updated:
2025-09-25
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modern-language-association-8th-edition
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modern-language-association-8th-edition
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