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Characterization and optimization of a dry etching process for silicon nitride spacer formation
Jonsson, Lars
Uppsala universitet, Institutionen för materialvetenskap.
Hedlund, Christer
Uppsala universitet, Institutionen för materialvetenskap.
ORCID iD:
0000-0003-2352-9006
Larsson, T
Katardjiev, Ilia
Uppsala universitet, Institutionen för materialvetenskap.
Berg, Sören
Uppsala universitet, Institutionen för materialvetenskap.
Blom, Hans-Olof
Uppsala universitet, Institutionen för materialvetenskap.
Show others and affiliations
1997 (English)
In:
The 44th international symposium of the American Vacuum Society, San José, USA, 1997
Conference paper (Refereed)
Place, publisher, year, edition, pages
1997.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN:
urn:nbn:se:miun:diva-31591
OAI: oai:DiVA.org:miun-31591
DiVA, id:
diva2:1140955
Conference
The 44th international symposium of the American Vacuum Society, San José, USA
Available from:
2007-03-05
Created:
2017-09-13
Last updated:
2025-09-25
Bibliographically approved
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Hedlund, Christer
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apa
ieee
modern-language-association-8th-edition
vancouver
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apa
ieee
modern-language-association-8th-edition
vancouver
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de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
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de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
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text
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html
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