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Design and Integration of Infrared Absorber Structures into Polymer Membranes based Thermal Detectors
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
2015 (English)Licentiate thesis, comprehensive summary (Other academic)
Place, publisher, year, edition, pages
Sundsvall: Mid Sweden University , 2015. , 90 p.
Series
Mid Sweden University licentiate thesis, ISSN 1652-8948 ; 118
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:miun:diva-26176Local ID: STCISBN: 978-91-88025-20-3 (print)OAI: oai:DiVA.org:miun-26176DiVA: diva2:866015
Presentation
2015-09-17, O111, Holmgatan 10, Sundsvall, 10:00 (English)
Opponent
Supervisors
Available from: 2015-11-02 Created: 2015-10-30 Last updated: 2017-03-02Bibliographically approved
List of papers
1. Surface modification of SU-8 for metal/SU-8 adhesion using RF plasma treatment for application in thermopile detectors
Open this publication in new window or tab >>Surface modification of SU-8 for metal/SU-8 adhesion using RF plasma treatment for application in thermopile detectors
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2015 (English)In: Materials Research Express, ISSN 2053-1591, Vol. 2, no 8, 086501Article in journal (Refereed) Published
Abstract [en]

This article reports on plasma treatment of SU-8 epoxy in order to enhance adhesive strength for metals. Its samples were fabricated on standard silicon wafers and treated with (O2 & Ar) RF plasma at a power of 25W at a low pressure of (3×10-3 torr) for different time spans (10 sec – 70 sec). The sample surfaces were characterized in terms of contact angle, surface (roughness and chemistry) and using a tape test. During the contact angle measurement, it was observed that the contact angle was reduced from 73° to 5° (almost wet) and 23° for (O2 & Ar) treated samples, respectively. The RMS surface roughness was significantly increased by 21.5% and 37.2% for (O2 & Ar) treatment, respectively. A pattern of metal squares was formed on the samples using photolithography for a tape test. An adhesive tape was applied to the samples and peeled off at 180o. The maximum adhesion results, more than 90%, were achieved for the O2-treated samples, whereas the Ar-treated samples showed no change. The XPS study shows the formation of new species in the O2-treated sample compared to the Ar-treated samples. The high adhesive results were due to the formation of hydrophilic groups and new O2 species in the O2-treated samples, which were absent in Ar-treated samples.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2015
Keyword
SU-8, contact angle, plasma treatment, surface modification, adhesion, tape test, theromocouples
National Category
Other Materials Engineering
Identifiers
urn:nbn:se:miun:diva-26157 (URN)10.1088/2053-1591/2/8/086501 (DOI)000370037800017 ()2-s2.0-84954539766 (Scopus ID)STC (Local ID)STC (Archive number)STC (OAI)
Available from: 2015-10-28 Created: 2015-10-28 Last updated: 2016-10-17Bibliographically approved
2. Design of a multilayered absorber structure based on SU-8 epoxy for broad and efficient absorption inMid-IR sensitive thermal detectors
Open this publication in new window or tab >>Design of a multilayered absorber structure based on SU-8 epoxy for broad and efficient absorption inMid-IR sensitive thermal detectors
2014 (English)In: Proceedings, 2014, 938-941 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on design, simulation and fabrication of a multilayered interferometric absorption structure with a broad absorption in the mid-infrared band. This region is used for IR based CH4 and CO2 detection. The structure consists of five layers of different thickness. The structure consists of one mirror layer of aluminium, two SU-8 epoxy layers and two thin titanium layers. This structure has been fabricated on a silicon substrate and verified for its absorption properties through Fourier transform infrared spectroscopy. The fabricated structure has been compared with simulations are performed using transfer matrix theory. The structure shows more than 90% absorption in the wavelength range of 3.20μm - 5.35μm for simulations and 3.13μm - 5.47μm for FT-IR measurements. The transmission and reflection of SU-8 epoxy was measured using FT-IR (that), resulting in a calculated absorption between 10 - 20% in the area of interest (3μm - 6μm). The use of SU-8 epoxy as dielectric medium, allows for direct integration of the structure into the membrane of a SU-8 membrane based thermopile. The integration results in minimum increase of the thermal capacitance and conductance, which results in maximum detector sensitivity and minimum time constant.

Keyword
Interferometric absorber Mid IR SU-8 Thermopile Transfer matrix therory
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:miun:diva-24232 (URN)10.1109/ICSENS.2014.6985156 (DOI)2-s2.0-84931040844 (Scopus ID)STC (Local ID)STC (Archive number)STC (OAI)
Conference
IEEE SENSORS 2014 (Valencia)
Funder
Knowledge Foundation
Available from: 2015-01-27 Created: 2015-01-27 Last updated: 2017-03-06Bibliographically approved
3. Integration of an interferometric IR absorber into an epoxy membrane based CO2 detector
Open this publication in new window or tab >>Integration of an interferometric IR absorber into an epoxy membrane based CO2 detector
2014 (English)In: Journal of Instrumentation, ISSN 1748-0221, E-ISSN 1748-0221, Vol. 9, no 5, Art. no. C05035- p.Article in journal (Refereed) Published
Abstract [en]

Measurements of carbon dioxide levels in the environment are commonly performedby using non-dispersive infrared technology (NDIR). Thermopile detectors are often used in NDIRsystems because of their non-cooling advantages. The infrared absorber has a major influence onthe detector responsivity. In this paper, the fabrication of a SU-8 epoxy membrane based Al/Bithermopile detector and the integration of an interferometric infrared absorber structure of wavelength around 4 µ m into the detector is reported. The membrane of thermopile detector has beenutilized as a dielectric medium in an interferometric absorption structure. By doing so, a reduction in both thermal conductance and capacitance is achieved. In the fabrication of the thermopile,metal evaporation and lift off process had been used for the deposition of serially interconnectedAl/Bi thermocouples. Serial resistance of fabricated thermopile was measured as 220 kΩ. Theresponse of fabricated thermopile detector was measured using a visible to infrared source of radiation flux 3.23 mW mm−2. The radiation incident on the detector was limited using a band passfilter of wavelength 4.26 µ m in front of the detector. A responsivity of 27.86 V mm2W−1at roomtemperature was achieved using this setup. The fabricated detector was compared to a referencedetector with a broad band absorber. From the comparison it was concluded that the integratedinterferometric absorber is functioning correctly.

Keyword
Detector modelling and simulations I (interaction of radiation with matter, interaction of photons with matter, interaction of hadrons with matter, etc); Spectrometers
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:miun:diva-21978 (URN)10.1088/1748-0221/9/05/C05035 (DOI)000340036100035 ()2-s2.0-84903641311 (Scopus ID)STC (Local ID)STC (Archive number)STC (OAI)
Conference
15th INTERNATIONAL WORKSHOP ON RADIATION IMAGING DETECTORS 23–27 JUNE 2013,PARIS, FRANCE
Available from: 2014-05-27 Created: 2014-05-27 Last updated: 2017-03-06Bibliographically approved

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