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Surface modification of SU-8 for metal/SU-8 adhesion using RF plasma treatment for application in thermopile detectors
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
Helmholtz Zentrum, Inst Methods & Instrumentat Synchrotron Radiat Re, Berlin, Germany.
Uppsala Univ, Dept Chem, Angstrom Lab, Uppsala, Sweden.
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2015 (English)In: Materials Research Express, ISSN 2053-1591, Vol. 2, no 8, 086501Article in journal (Refereed) Published
Abstract [en]

This article reports on plasma treatment of SU-8 epoxy in order to enhance adhesive strength for metals. Its samples were fabricated on standard silicon wafers and treated with (O2 & Ar) RF plasma at a power of 25W at a low pressure of (3×10-3 torr) for different time spans (10 sec – 70 sec). The sample surfaces were characterized in terms of contact angle, surface (roughness and chemistry) and using a tape test. During the contact angle measurement, it was observed that the contact angle was reduced from 73° to 5° (almost wet) and 23° for (O2 & Ar) treated samples, respectively. The RMS surface roughness was significantly increased by 21.5% and 37.2% for (O2 & Ar) treatment, respectively. A pattern of metal squares was formed on the samples using photolithography for a tape test. An adhesive tape was applied to the samples and peeled off at 180o. The maximum adhesion results, more than 90%, were achieved for the O2-treated samples, whereas the Ar-treated samples showed no change. The XPS study shows the formation of new species in the O2-treated sample compared to the Ar-treated samples. The high adhesive results were due to the formation of hydrophilic groups and new O2 species in the O2-treated samples, which were absent in Ar-treated samples.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2015. Vol. 2, no 8, 086501
Keyword [en]
SU-8, contact angle, plasma treatment, surface modification, adhesion, tape test, theromocouples
National Category
Other Materials Engineering
Identifiers
URN: urn:nbn:se:miun:diva-26157DOI: 10.1088/2053-1591/2/8/086501ISI: 000370037800017Scopus ID: 2-s2.0-84954539766Local ID: STCOAI: oai:DiVA.org:miun-26157DiVA: diva2:865444
Available from: 2015-10-28 Created: 2015-10-28 Last updated: 2016-10-17Bibliographically approved
In thesis
1. Design and Integration of Infrared Absorber Structures into Polymer Membranes based Thermal Detectors
Open this publication in new window or tab >>Design and Integration of Infrared Absorber Structures into Polymer Membranes based Thermal Detectors
2015 (English)Licentiate thesis, comprehensive summary (Other academic)
Place, publisher, year, edition, pages
Sundsvall: Mid Sweden University, 2015. 90 p.
Series
Mid Sweden University licentiate thesis, ISSN 1652-8948 ; 118
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:miun:diva-26176 (URN)STC (Local ID)978-91-88025-20-3 (ISBN)STC (Archive number)STC (OAI)
Presentation
2015-09-17, O111, Holmgatan 10, Sundsvall, 10:00 (English)
Opponent
Supervisors
Available from: 2015-11-02 Created: 2015-10-30 Last updated: 2017-03-02Bibliographically approved

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CiteExportLink to record
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Citation style
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