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Design of a multilayered absorber structure based on SU-8 epoxy for broad and efficient absorption inMid-IR sensitive thermal detectors
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
2014 (English)In: Proceedings, 2014, 938-941 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on design, simulation and fabrication of a multilayered interferometric absorption structure with a broad absorption in the mid-infrared band. This region is used for IR based CH4 and CO2 detection. The structure consists of five layers of different thickness. The structure consists of one mirror layer of aluminium, two SU-8 epoxy layers and two thin titanium layers. This structure has been fabricated on a silicon substrate and verified for its absorption properties through Fourier transform infrared spectroscopy. The fabricated structure has been compared with simulations are performed using transfer matrix theory. The structure shows more than 90% absorption in the wavelength range of 3.20μm - 5.35μm for simulations and 3.13μm - 5.47μm for FT-IR measurements. The transmission and reflection of SU-8 epoxy was measured using FT-IR (that), resulting in a calculated absorption between 10 - 20% in the area of interest (3μm - 6μm). The use of SU-8 epoxy as dielectric medium, allows for direct integration of the structure into the membrane of a SU-8 membrane based thermopile. The integration results in minimum increase of the thermal capacitance and conductance, which results in maximum detector sensitivity and minimum time constant.

Place, publisher, year, edition, pages
2014. 938-941 p.
Keyword [en]
Interferometric absorber Mid IR SU-8 Thermopile Transfer matrix therory
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:miun:diva-24232DOI: 10.1109/ICSENS.2014.6985156Scopus ID: 2-s2.0-84931040844Local ID: STCOAI: oai:DiVA.org:miun-24232DiVA: diva2:783893
Conference
IEEE SENSORS 2014 (Valencia)
Funder
Knowledge Foundation
Available from: 2015-01-27 Created: 2015-01-27 Last updated: 2017-03-06Bibliographically approved
In thesis
1. Design and Integration of Infrared Absorber Structures into Polymer Membranes based Thermal Detectors
Open this publication in new window or tab >>Design and Integration of Infrared Absorber Structures into Polymer Membranes based Thermal Detectors
2015 (English)Licentiate thesis, comprehensive summary (Other academic)
Place, publisher, year, edition, pages
Sundsvall: Mid Sweden University, 2015. 90 p.
Series
Mid Sweden University licentiate thesis, ISSN 1652-8948 ; 118
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:miun:diva-26176 (URN)STC (Local ID)978-91-88025-20-3 (ISBN)STC (Archive number)STC (OAI)
Presentation
2015-09-17, O111, Holmgatan 10, Sundsvall, 10:00 (English)
Opponent
Supervisors
Available from: 2015-11-02 Created: 2015-10-30 Last updated: 2017-03-02Bibliographically approved

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Ashraf, ShakeelMattsson, ClaesThungström, Göran
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CiteExportLink to record
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Citation style
  • apa
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