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Hall Measurement for characterization of doping profile in Semiconductor
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Electronics)
2014 (English)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesisAlternative title
Hall Measurement for characterization of doping profile in Semiconductor (English)
Abstract [en]

The aim of project is to characterize a doping profile in relation to the development of detectors. Future generations of CMOS devices will require source and drain contacts, which have a depth of less than 10 to 20nm. The sample preparation and anodic oxidation are the two primary and foremost tasks of the project. The stripping Hall machine HL5900+, which is a fully automatic measuring system (AMS), measured the profiles of semiconductor materials automatically, by repeating anodic oxidation, etching and measurement using the Hall Effect. The concentration profiles of n-type and p-type were measured by means of Hall-effect sheet-resistivity measurements combined with a layer removal by using anodic oxidation and etching. The oxide layer was removed by using an electrochemical process through anodic oxidation.

Place, publisher, year, edition, pages
2014. , p. 74
Keywords [en]
Electronics Design, Hall Effect measurement, Doping Profiles for Detectors
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:miun:diva-21639OAI: oai:DiVA.org:miun-21639DiVA, id: diva2:708778
Subject / course
Electronics EL1
Educational program
International Master's Programme in Electronics Design TELAA 120 higher education credits
Presentation
2013-03-06, S113, MID SWEDEN UNIVERSITY 851 70 HOLMGATAN, SUNDSVALL SWEDEN, 10:00 (English)
Supervisors
Examiners
Available from: 2014-04-07 Created: 2014-03-28 Last updated: 2014-04-07Bibliographically approved

Open Access in DiVA

Habib Ullah Khan Jadoon_EL007A_Thesis_Report(2664 kB)86 downloads
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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
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  • Other locale
More languages
Output format
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