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MEMS sensor for in-situ TEM atomic force microscopy
Chalmers Göteborg.
Nanofactory Instruments AB Göteborg.
Imego Institute Göteborg.
Karlstad Universitet.
Show others and affiliations
2008 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 17, no 2, 328-333 p.Article in journal (Refereed) Published
Abstract [en]

Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope ITEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.

Place, publisher, year, edition, pages
2008. Vol. 17, no 2, 328-333 p.
Keyword [en]
TEM-SPM in-situ probing nanoteknik nanotechnology
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:miun:diva-4314DOI: 10.1109/JMEMS.2007.912714ISI: 000258996600009Scopus ID: 2-s2.0-64649086289Local ID: 5143OAI: oai:DiVA.org:miun-4314DiVA: diva2:29346
Available from: 2008-11-30 Created: 2008-11-19 Last updated: 2016-09-26Bibliographically approved

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Olin, Håkan
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Department of Natural Sciences, Engineering and Mathematics
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