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MEMS Sensor for in-situ TEM Atomic Force microscopy
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2007 (English)In: IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS., IEEE conference proceedings, 2007, 103-106 p.Conference paper, (Refereed)
Place, publisher, year, edition, pages
IEEE conference proceedings, 2007. 103-106 p.
Keyword [en]
nanotechnology nanoteknik
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Natural Sciences
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URN: urn:nbn:se:miun:diva-3897DOI: 10.1109/MEMSYS.2007.4433025Local ID: 4248ISBN: 978142440955 (print)OAI: oai:DiVA.org:miun-3897DiVA: diva2:28929
Available from: 2008-11-30 Created: 2008-11-30 Last updated: 2013-08-23Bibliographically approved

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Olin, Håkan
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Department of Natural Sciences
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CiteExportLink to record
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Citation style
  • apa
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