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A Monte Carlo Study of low field transport in Al doped 4H-SiC
Department of Microelectronics and Information Technology, Royal Institute of Technology (KTH), Electrum 229, SE-16440 Stockholm.
Mid Sweden University, Faculty of Science, Technology and Media, Department of Information Technology and Media.
Department of Microelectronics and Information Technology, Royal Institute of Technology (KTH), Electrum 229, SE-16440 Stockholm.
Mid Sweden University, Faculty of Science, Technology and Media, Department of Information Technology and Media.ORCID iD: 0000-0002-3790-0729
2001 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 184, no 1-4, 173-177 p.Article in journal (Refereed) Published
Abstract [en]

The ohmic transport of holes in p-type aluminum-doped 4H-SiC samples is investigated using a Monte Carlo (MC) tool based on a full-potential band structure. The temperature and doping dependence of the hole mobility and its anisotropy are calculated and discussed from a physical point of view, where we stress the importance of considering two-band conduction. Acoustic and optical phonon scattering, as well as ionized and neutral impurity scattering, have been considered. The MC program considers incomplete ionization of impurity atoms, and we assume an impurity level with the ionization energy 0.2 eV, corresponding to Al-doped samples. © 2001 Published by Elsevier Science B.V

Place, publisher, year, edition, pages
2001. Vol. 184, no 1-4, 173-177 p.
Keyword [en]
4H-SiC, Anisotropy, Mobility, Monte Carlo simulation
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:miun:diva-3502DOI: 10.1016/S0169-4332(01)00498-6ISI: 000173000100029Scopus ID: 2-s2.0-0035852195Local ID: 3619OAI: oai:DiVA.org:miun-3502DiVA: diva2:28534
Note

The paper was also presented at the following conference: Spring Meeting of the European-Materials-Research-Society STRASBOURG, FRANCE, JUN 05-08, 2001 European Mat Res Soc

Available from: 2008-09-30 Created: 2008-09-30 Last updated: 2016-10-17Bibliographically approved

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CiteExportLink to record
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Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
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Language
  • de-DE
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