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A new etching method for silicon micro machining (master thesis)
Mid Sweden University, Faculty of Science, Technology and Media, Department of Engineering, Physics and Mathematics.
Responsible organisation
1995 (English)Other (Other academic)
Place, publisher, year, pages
Uppsala: Department of Technology, Division of Solid State Electronics, Uppsala University , 1995.
Keyword [en]
Nano technology
National Category
Paper, Pulp and Fiber Technology
Identifiers
URN: urn:nbn:se:miun:diva-2264Local ID: 1490OAI: oai:DiVA.org:miun-2264DiVA: diva2:27296
Available from: 2008-09-30 Created: 2009-06-08Bibliographically approved

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Isaksson, Per
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CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf