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Planarized patterning of Y-Ba-Cu-O thin films for multilayer technology
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1995 (English)In: IEEE transactions on applied superconductivity (Print), ISSN 1051-8223, E-ISSN 1558-2515, Vol. 5, p. 1653-1656Article in journal (Refereed) Published
Abstract [en]

Planarized layers of YBa2Cu3O7 (YBCO) were made by etching trenches in SrTiO3 (STO) substrates, laser depositing a YBCO film and mechanically polishing the film down to the substrate surface. These structures exhibited critical temperatures (Tc) of 88 K and a critical-current density (Jc) of 106 A/cm2 at 77 K. The planarized surface was smooth, with a maximum height difference between the YBCO and STO of 20 nm. The surfaces were used as templates for epitaxial growth of multilayer insulators of STO and PrBa2Cu3O7 (PBCO) and top YBCO layers. Complete crossovers, free of superconducting shorts, with Tc of 86 K and critical current density (Jc) of 2×105 A/cm2 were made.

Place, publisher, year, edition, pages
1995. Vol. 5, p. 1653-1656
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:miun:diva-9861DOI: 10.1109/77.402893OAI: oai:DiVA.org:miun-9861DiVA, id: diva2:236680
Note
1994 Applied Superconductivity Conference, BOSTON, MA, OCT 16-21, 1994Available from: 2009-09-24 Created: 2009-09-24 Last updated: 2017-12-13Bibliographically approved

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Olin, Håkan

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