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Dry etching of buried layers without removing the overlayers
Uppsala Universitet.ORCID iD: 0000-0003-2352-9006
Uppsala universitet, Fasta tillståndets elektronik.
1992 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1992.
National Category
Engineering and Technology
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URN: urn:nbn:se:miun:diva-47355OAI: oai:DiVA.org:miun-47355DiVA, id: diva2:1730848
Conference
15th Nord semiconductor meeting, Finland
Available from: 2015-07-17 Created: 2023-01-25 Last updated: 2023-01-25Bibliographically approved

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Hedlund, Christer

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Hedlund, Christer
Engineering and Technology

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CiteExportLink to record
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  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
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Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
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Output format
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