Mid Sweden University

miun.sePublications
System disruptions
We are currently experiencing disruptions on the search portals due to high traffic. We are working to resolve the issue, you may temporarily encounter an error message.
EnglishSvenskaNorsk
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Anisotropic etching of Z-cut quartz
ORCID iD: 0000-0003-2352-9006
Uppsala universitet, Fasta tillståndets elektronik.
1993 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 3, p. 65-73Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1993. Vol. 3, p. 65-73
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:miun:diva-47353OAI: oai:DiVA.org:miun-47353DiVA, id: diva2:1730842
Available from: 2015-07-15 Created: 2023-01-25 Last updated: 2023-01-25Bibliographically approved

Open Access in DiVA

No full text in DiVA

Authority records

Hedlund, Christer

Search in DiVA

By author/editor
Hedlund, Christer
In the same journal
Journal of Micromechanics and Microengineering
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 17 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
v. 2.45.0
|
WCAG
|
Mid Sweden University Library
|
Mid Sweden University - Research
|
DiVA Login
|
Contact