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A new pixel sensor for uniformity control in ion implantation
University of GLasgow.
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2003 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, Vol. 206, 462-466 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2003. Vol. 206, 462-466 p.
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Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:miun:diva-8260DOI: 10.1016/S0168-583X(03)00794-8ISI: 000183690500102OAI: oai:DiVA.org:miun-8260DiVA: diva2:133873
Available from: 2009-01-15 Created: 2009-01-15 Last updated: 2011-07-08Bibliographically approved

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Abdalla, MunirFröjdh, Christer

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Abdalla, MunirFröjdh, Christer
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Department of Information Technology and Media
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Electrical Engineering, Electronic Engineering, Information Engineering

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