Mid Sweden University

Radiation hardness measurements have been done by irradiating lateral position sensitive (Si) detectors (LPSD) with 93 eV photons. Three different passivation layers have been investigated, SiO2, oxynitride and deposited 4 nm titanium-layer, on p in n-substrate LPSD and deposited 4 nm titanium layer on n in p-substrate LPSD. Best radiation hardness for 93 eV photon is obtained by using a 4 nm titanium layer. Only a slight decrease in response can be seen in the p in n-substrate LPSD. The best radiation hardness is achieved by using the n in p-substrate LPSD, which show no significant decrease in response. Scanning after irradiation with 93 eV gives only a variation in response of 0.26% in the surrounding area of exposure. No decrease in response can be detected during the scan. Test with a 108 eV photon beam gives an increased variation in response of 0.7%, caused by the shallower absorption in Si.