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A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters
Chalmers University of Technology.
Chalmers University of Technology.
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. RISE Acreo AB.
MyVox AB.
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2018 (English)In: Micromachines, ISSN 2072-666X, E-ISSN 2072-666X, Vol. 9, no 5Article in journal (Refereed) Published
Abstract [en]

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

Place, publisher, year, edition, pages
MDPI , 2018. Vol. 9, no 5
Keywords [en]
piezoelectric micro-energy harvester, lead zirconate titanate, bandwidth broadening, coupled cantilevers, enhanced stress distribution, finite element modeling, microelectromechanical systems (MEMS)
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:miun:diva-35390DOI: 10.3390/mi9050252ISI: 000435195500056OAI: oai:DiVA.org:miun-35390DiVA, id: diva2:1276370
Note

Published online 2018 May 21

Available from: 2019-01-08 Created: 2019-01-08 Last updated: 2019-08-06Bibliographically approved

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Rusu, Cristina
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