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MEMS sensor for in situ TEM atomic force microscopy
Mid Sweden University, Faculty of Science, Technology and Media, Department of Natural Sciences.ORCID iD: 0000-0001-7329-3359
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2008 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
2008.
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URN: urn:nbn:se:miun:diva-33541OAI: oai:DiVA.org:miun-33541DiVA, id: diva2:1201990
Note

International application: WO 08/089950 (A1) 2008-07-31.

Available from: 2018-04-27 Created: 2018-04-27 Last updated: 2018-04-27Bibliographically approved

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Olin, Håkan

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