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A method for the determination of the angular dependence during dry etching
Uppsala universitet, Institutionen för materialvetenskap.ORCID iD: 0000-0003-2352-9006
Uppsala universitet, Institutionen för materialvetenskap.
Uppsala universitet, Institutionen för materialvetenskap.
Uppsala universitet, Institutionen för materialvetenskap.
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1995 (English)In: The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995Conference paper (Refereed)
Place, publisher, year, edition, pages
1995.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:miun:diva-31584OAI: oai:DiVA.org:miun-31584DiVA, id: diva2:1140973
Conference
The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct
Available from: 2007-03-07 Created: 2017-09-13 Last updated: 2017-09-13Bibliographically approved

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Hedlund, Christer

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