Mid Sweden University
miun.se
Publications
Please wait ...
Simple search
Advanced search -
Research publications
Advanced search -
Student theses
Statistics
English
Svenska
Norsk
Jump to content
Change search
Search
Search
Only documents with full text in DiVA
Cite
Export
BibTex
CSL-JSON
CSV 1
CSV 2
CSV 3
CSV 4
CSV 5
CSV all metadata
CSV all metadata version 2
RIS
Mods
MARC-XML
ETDMS
Link to record
Permanent link
https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-31588
Direct link
http://miun.diva-portal.org/smash/record.jsf?pid=diva2:1140963
Cite
Citation style
apa
ieee
modern-language-association-8th-edition
vancouver
Other style
apa
ieee
modern-language-association-8th-edition
vancouver
Other style
More styles
Language
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
More languages
Output format
html
text
asciidoc
rtf
html
text
asciidoc
rtf
Create
Close
Patterning of Reactively Sputteres Tantalum Pentoxide, a High Epsilon Material, by Plasma Etching
Jonsson, Lars
Uppsala universitet, Institutionen för materialvetenskap.
Engelmark, Fredrik
Uppsala universitet, Institutionen för materialvetenskap.
Du, Jing
Uppsala universitet, Institutionen för materialvetenskap.
Hedlund, Christer
Uppsala universitet, Institutionen för materialvetenskap.
ORCID iD:
0000-0003-2352-9006
Smith, Ulf
Uppsala universitet, Institutionen för materialvetenskap.
Blom, Hans-Olof
Uppsala universitet, Institutionen för materialvetenskap.
Show others and affiliations
1998 (English)
In:
The American Vacuum Society 45th National Symposium in Baltimore, 1998
Conference paper (Refereed)
Place, publisher, year, edition, pages
1998.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN:
urn:nbn:se:miun:diva-31588
OAI: oai:DiVA.org:miun-31588
DiVA, id:
diva2:1140963
Conference
The American Vacuum Society 45th National Symposium in Baltimore
Available from:
2007-03-01
Created:
2017-09-13
Last updated:
2017-09-13
Bibliographically approved
Open Access in DiVA
No full text in DiVA
Authority records
Hedlund, Christer
Search in DiVA
By author/editor
Hedlund, Christer
On the subject
Other Electrical Engineering, Electronic Engineering, Information Engineering
Search outside of DiVA
Google
Google Scholar
urn-nbn
Altmetric score
urn-nbn
Total: 250 hits
Cite
Export
BibTex
CSL-JSON
CSV 1
CSV 2
CSV 3
CSV 4
CSV 5
CSV all metadata
CSV all metadata version 2
RIS
Mods
MARC-XML
ETDMS
Link to record
Permanent link
https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-31588
Direct link
http://miun.diva-portal.org/smash/record.jsf?pid=diva2:1140963
Cite
Citation style
apa
ieee
modern-language-association-8th-edition
vancouver
Other style
apa
ieee
modern-language-association-8th-edition
vancouver
Other style
More styles
Language
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
Other locale
More languages
Output format
html
text
asciidoc
rtf
html
text
asciidoc
rtf
Create
Close
v. 2.47.0
|
WCAG
|
Mid Sweden University Library
|
Mid Sweden University - Research
|
DiVA Login
|
Contact
DiVA
Logotyp