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Silicon fusion bond interfaces resilient to wet anisotropic etchants
Uppsala universitet, Institutionen för materialvetenskap.
Uppsala universitet, Institutionen för materialvetenskap.
Uppsala universitet, Institutionen för materialvetenskap.
Uppsala universitet, Institutionen för materialvetenskap.ORCID iD: 0000-0003-2352-9006
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2000 (English)In: Micromechanics Europe 2000, Uppsala, 2000, p. 142-145Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2000. p. 142-145
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:miun:diva-31596OAI: oai:DiVA.org:miun-31596DiVA, id: diva2:1140952
Conference
Micromechanics Europe 2000, Uppsala
Available from: 2007-02-09 Created: 2017-09-13 Last updated: 2017-09-13Bibliographically approved

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Hedlund, Christer

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