miun.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Discharge disruptions in a helicon plasma source
Uppsala universitet, Institutionen för materialvetenskap.
Show others and affiliations
1997 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 15, no 6, p. 2864-2874Article in journal (Refereed) Published
Abstract [en]

We study experimentally and theoretically stable regimes and dischargedisruptions in a helicon plasma source. At fixed input power and gas pressure, stable operation of the source is possible below some critical value of magnetic field Bcr." role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">Bcr.Bcr. The plasma density increases with the magnetic field and reaches a maximum value nmax" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">nmaxnmax at Bcr;" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">Bcr;Bcr; after which the discharge disruption occurs. Both Bcr" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">BcrBcr and nmax" role="presentation" style="display: inline; line-height: normal; word-spacing: normal; word-wrap: normal; white-space: nowrap; float: none; direction: ltr; max-width: none; max-height: none; min-width: 0px; min-height: 0px; border: 0px; padding: 0px; margin: 0px; position: relative;">nmaxnmax increase almost linearly with the input power and the rate of increase is increasing with the pressure. Matching of the plasma load to the rf power source improves when approaching the disruption point, and becomes perfect at the critical field. The theory of discharge disruptions assumes the power absorption in a helicon source to arise from the linear conversion of helicon waves into electrostatic waves at the plasma edge. The calculated dependence of the absorbed power on the plasma density turns out to be nonmonotonic with minima at antiresonances of the electrostatic waveexcitation. This explains qualitatively principal peculiarities of dischargedisruptions. The calculated plasma impedance is in agreement with experimental value within a factor of 2.

Place, publisher, year, edition, pages
1997. Vol. 15, no 6, p. 2864-2874
Identifiers
URN: urn:nbn:se:miun:diva-31608DOI: 10.1116/1.580841OAI: oai:DiVA.org:miun-31608DiVA, id: diva2:1140925
Available from: 2007-03-12 Created: 2017-09-13 Last updated: 2017-09-13Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full text

Authority records BETA

Hedlund, Christer

Search in DiVA

By author/editor
Hedlund, Christer
In the same journal
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 46 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf