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Fabrication of a mid-Ir sensitive thermopile detector
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design. (Detector and Photonics)
2016 (English)In: Proceedings of IEEE Sensors, IEEE, 2016, 7808481Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on the integration of a multilayered mid-infrared absorber structure into a SU-8 epoxy membrane-based thermopile detector. The absorber structure was designed and simulated using transfer matrix theory. The fabricated absorber structures were characterized through Fourier transform infrared spectroscopy. The structure shows an absorption of more than 95% in the wavelength range of 3.30pm–5pm for simulations, and 3.2pm–5.47pm for FTIR measurements. The complete fabrication process of a thermopile detector including the integration of a multilayered absorber structure has been presented. A MEMS based infrared emitter was used to characterize the fabricated detector. The serial resistance was measured to 315 kΩ and the responsivity was calculated to 57.5 Vmm2W−1 at a wavelength of 4.26pm. The time constant for the fabricated detector was estimated to around 21ms.

Place, publisher, year, edition, pages
IEEE, 2016. 7808481
Series
IEEE Sensors, ISSN 1930-0395
Keyword [en]
Detectors, Voltage measurement, Fabrication, Absorption, Electrical resistance measurement, Wavelength measurement, Resistance
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:miun:diva-29547DOI: 10.1109/ICSENS.2016.7808481ISI: 000399395700076Scopus ID: 2-s2.0-85011003061Local ID: STCISBN: 978-1-4799-8287-5 (print)OAI: oai:DiVA.org:miun-29547DiVA: diva2:1066109
Conference
15th IEEE Sensors Conference, SENSORS 2016; Convention Center at the Caribe Royale HotelOrlando; United States; 30 October 2016 through 2 November 2016
Available from: 2017-01-17 Created: 2016-12-13 Last updated: 2017-06-29Bibliographically approved

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Publisher's full textScopushttp://ieeexplore.ieee.org/document/7808481/

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Ashraf, ShakeelMattsson, ClaesThungström, Göran

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