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Anisotropic etching of Z-cut quartz
ORCID iD: 0000-0003-2352-9006
Uppsala universitet, Fasta tillståndets elektronik.
1993 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 3, p. 65-73Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1993. Vol. 3, p. 65-73
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Engineering and Technology
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URN: urn:nbn:se:miun:diva-47353OAI: oai:DiVA.org:miun-47353DiVA, id: diva2:1730842
Available from: 2015-07-15 Created: 2023-01-25 Last updated: 2023-01-25Bibliographically approved

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Hedlund, Christer

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