miun.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Fabrication and characterization of a SU8-epoxy membrane based thermopile detector with an integrated multilayered absorber structure for the mid-IR region
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design.
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design.ORCID iD: 0000-0003-3769-8492
Mid Sweden University, Faculty of Science, Technology and Media, Department of Electronics Design.
2019 (English)In: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 19, no 11, p. 4000-4007Article in journal (Refereed) Published
Abstract [en]

This paper reports on the fabrication and characterization of a thermopile detector with an integrated mid-infrared absorber structure. The fabricated absorber structure has shown an absorption of more than 95% in the wavelength range of 3.2 – 5.47 μm. The detector was fabricated with standard cleanroom process techniques and equipment. The serial resistance was measured at about 315 kΩ at room temperature. The photosensitivity of the detector was characterized for a signle wavelength (4.26 µm) and a band of wavelength ranging from 2.5 –5.5 µm through two different measurement setups. In the first measurement setup, the photosensitivity was estimated at 57.5 V·mm2·W-1 through a MEMS-based infrared radiation source and with an optical band-pass filter of wavelength 4.26µm. The following characterization was performed to characterise the photosensitivity of the detector in a broader wavelength range. This measurement was taken using a monochromator setup utilizing a reference photodetector for calculations of the optical power of the infrared source. The photosensitivity and the specific detectivity (D*) of the fabricated detector were measured to values of 30-92 V·W-1 and 8.0×107-2.4×108 cm·Hz1/2·W-1, respectively, in the wavelength range of 2.8 – 5 µm. The time constant was estimated to around 21 ms

Place, publisher, year, edition, pages
2019. Vol. 19, no 11, p. 4000-4007
Keywords [en]
Interfermometric absorber, Thermopile, Infrared detector, SU8 epoxy, photosensitivity, Transfer matrix theory, CO2 detection
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:miun:diva-35525DOI: 10.1109/JSEN.2019.2896668ISI: 000467060100005Scopus ID: 2-s2.0-85065396140OAI: oai:DiVA.org:miun-35525DiVA, id: diva2:1282678
Available from: 2019-01-25 Created: 2019-01-25 Last updated: 2019-07-09Bibliographically approved

Open Access in DiVA

fulltext(1530 kB)134 downloads
File information
File name FULLTEXT01.pdfFile size 1530 kBChecksum SHA-512
83216e1b6ba9ef4d281a4143bc4bd6d6c09eafcf6db465519e140f47d86ddd32c68e1b05aaec946819831c00c6e0e60a5cbcd6be00442325a7ba9ebdd1b5fb81
Type fulltextMimetype application/pdf

Other links

Publisher's full textScopus

Authority records BETA

Ashraf, ShakeelMattsson, ClaesThungström, Göran

Search in DiVA

By author/editor
Ashraf, ShakeelMattsson, ClaesThungström, Göran
By organisation
Department of Electronics Design
In the same journal
IEEE Sensors Journal
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 134 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 228 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf