miun.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Compositional variations of sputter deposited Ti/W barrier layers on substrates with pronounced surface topography
Uppsala universitet, Institutionen för materialvetenskap.
Uppsala universitet, Institutionen för materialvetenskap.ORCID iD: 0000-0003-2352-9006
Uppsala universitet, Institutionen för materialvetenskap.
Uppsala universitet, Institutionen för materialvetenskap.
1999 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 348, no 1-2, p. 227-232Article in journal (Refereed) Published
Abstract [en]

Sputter deposited Ti/W barrier layers have been found to be Ti deficient with respect to the target composition, which is attributed to the preferential resputtering of Ti from the deposited films by energetic neutrals or ions from the discharge. On the o

Place, publisher, year, edition, pages
1999. Vol. 348, no 1-2, p. 227-232
Keywords [en]
deposition process; titanium; tungsten; ion bombardment; YIELD AMPLIFICATION; ION-BOMBARDMENT; MICROSTRUCTURE
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:miun:diva-31590DOI: 10.1016/S0040-6090(99)00130-3OAI: oai:DiVA.org:miun-31590DiVA, id: diva2:1140971
Note

Addresses: Jonsson LB, Univ Uppsala, Angstrom Lab, Box 534, S-75121 Uppsala, Sweden. Univ Uppsala, Angstrom Lab, S-75121 Uppsala, Sweden.

Available from: 2007-03-01 Created: 2017-09-13 Last updated: 2017-09-13Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full text

Authority records BETA

Hedlund, Christer

Search in DiVA

By author/editor
Hedlund, Christer
In the same journal
Thin Solid Films
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 176 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf