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Processing and characterization of a position sensitive lateral-effect metal oxide semiconductor detector
Mittuniversitetet, Fakulteten för naturvetenskap, teknik och medier, Institutionen för informationsteknologi och medier.
Mittuniversitetet, Fakulteten för naturvetenskap, teknik och medier, Institutionen för informationsteknologi och medier.
Mittuniversitetet, Fakulteten för naturvetenskap, teknik och medier, Institutionen för informationsteknologi och medier.ORCID-id: 0000-0002-3790-0729
Ansvarlig organisasjon
2004 (engelsk)Inngår i: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, ISSN 0168-9002, E-ISSN 1872-9576, Vol. 531, nr 1-2, s. 140-146Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Position sensingdetectors (PSDs) are useful in many applications, such as vibration, displacement, and triangulation measurements. In this paper we present a lateral-effect metal oxide semiconductor PSD with switchingcapability fabricated by our group. The detector can be switched off by the application of 0V on the substrate and 0.2V on the gate. A linear current-position behaviour is exhibited by the detector at a substrate bias of both 5 and 10V with the gate at 0V. There is no effect on the linearity when the substrate voltage is changed from 5 to 10V. The non-linearity is within 0.2% at a distance of 71.5mm from origin for 5, 10 and 15mm device length.

sted, utgiver, år, opplag, sider
ELSEVIER SCIENCE BV , 2004. Vol. 531, nr 1-2, s. 140-146
Emneord [en]
MOS ITO PSD position sensitive detector anti reflective coating
HSV kategori
Identifikatorer
URN: urn:nbn:se:miun:diva-3540DOI: 10.1016/j.nima.2004.05.108ISI: 000224233400020Lokal ID: 1598OAI: oai:DiVA.org:miun-3540DiVA, id: diva2:28572
Konferanse
5th International Workshop on Radiation Imaging Detectors, Sep 07-11, 2003, Riga, Latvia
Merknad
5th International Workshop on Radiation Imaging Detectors, Sep 07-11, 2003, Riga, LatviaTilgjengelig fra: 2008-09-30 Laget: 2008-11-02 Sist oppdatert: 2017-12-12bibliografisk kontrollert
Inngår i avhandling
1. Development of Process Technology for Photon Radiation Measurement Applications
Åpne denne publikasjonen i ny fane eller vindu >>Development of Process Technology for Photon Radiation Measurement Applications
2007 (engelsk)Licentiatavhandling, med artikler (Annet vitenskapelig)
Abstract [en]

This thesis presents work related to new types of photo detectors and their applications. The focus has been on the development of process technology and methods by means of experimentation and measurements. The overall aim has been to develop and improve photon radiation measurement applications which are possible to manufacture using standard Si processing technology.

A new type of position sensitive detector that has switching possibilities based on the MOS principle has been fabricated and characterized. The influence of mechanical stress on the linearity of position sensitive detectors has been investigated. The results show that mechanical stress arising, for example, by the mounting of detectors in capsules can have an impact on device performance. Under normal circumstances these effects are rather small, but are considered to be worthwhile taking into account.

Electroless deposition of Nickel including various dopants in porous silicon was performed to manufacture electrical contacts for this interesting material. After heat treatment it was confirmed by X-ray diffraction that Nickel silicide had been formed and I-V measurements show that different contacts exhibit Ohmic and rectifying behaviour.

Spectrometers are used extensively in the process and food industry to measure both the chemical content and the amount of substances used during manufacturing. These instruments are often rather bulky and costly, though the trend is towards smaller and more portable equipment. A spectrometer based on an array of Fabry-Perot interferometers mounted close to an array detector is shown to be a viable option for the manufacture of a very compact device. Such a device has minimal intermediate optics and it may be possible, in the future, for it to be developed and completely integrated with a detector array into a single unit.

sted, utgiver, år, opplag, sider
Sundsvall: Mittuniversitetet, 2007. s. 42
Serie
Mid Sweden University licentiate thesis, ISSN 1652-8948 ; 16
HSV kategori
Identifikatorer
urn:nbn:se:miun:diva-9334 (URN)91-85317-32-2 (ISBN)
Presentation
(engelsk)
Opponent
Veileder
Tilgjengelig fra: 2009-07-10 Laget: 2009-07-10 Sist oppdatert: 2010-01-14bibliografisk kontrollert

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Andersson, HenrikThungström, GöranNilsson, Hans-Erik

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Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

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