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Simple method for quality factor estimation in resonating MEMS structures
RISE Acreo AB, Sweden.
RISE Acreo AB, Sweden.
RISE Acreo AB, Sweden.
RISE Acreo AB, Sweden.
Vise andre og tillknytning
2018 (engelsk)Inngår i: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 1052, nr 1, artikkel-id 012100Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The quality factor of a packaged MEMS resonating structure depends on both the packaging pressure and the structure’s proximity to the walls. This type of mechanical constraints, which causes energy dissipation from the structure to the surrounding air, are applicable for oscillating energy harvesters and should be considered in the design process. However, the modelling of energy losses or the measurements of their direct influence inside a packaged chip is not trivial. In this paper, a simple experimental method to quantify the energy loss in an oscillating MEMS structures due to the surrounding air is described together with preliminary results. The main advantage of the method is the ability to characterize the damping contributions under different vacuum and packaging conditions without requiring any packaging of the harvester chip or fabrication of multiple devices with different cavity depths.

sted, utgiver, år, opplag, sider
2018. Vol. 1052, nr 1, artikkel-id 012100
HSV kategori
Identifikatorer
URN: urn:nbn:se:miun:diva-35417DOI: 10.1088/1742-6596/1052/1/012100ISI: 000442553700100Scopus ID: 2-s2.0-85051331110OAI: oai:DiVA.org:miun-35417DiVA, id: diva2:1277022
Tilgjengelig fra: 2019-01-09 Laget: 2019-01-09 Sist oppdatert: 2019-08-06bibliografisk kontrollert

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